Sublimation Epitaxy
Partner: Ion Beam Services
Ion Beam Services is now marketing its high-temperature implantion chucks, and has already sold units to several industrial and academic European research groups.
The company is also offering Silicon Carbide implantation as a subcontract service alongside its conventional Silicon processes.
In the longer-term, Ion Beam Services plans to establish a Silicon Carbide foundry capability, producing complete devices for third parties.